Ohutkulta-pinnoitustekniikoiden vertailu

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Journal Title
Journal ISSN
Volume Title
Kemiantekniikan korkeakoulu | Bachelor's thesis
Electronic archive copy is available locally at the Harald Herlin Learning Centre. The staff of Aalto University has access to the electronic bachelor's theses by logging into Aaltodoc with their personal Aalto user ID. Read more about the availability of the bachelor's theses.
Date
2017-12-04
Department
Major/Subject
Materiaalitiede ja -tekniikka
Mcode
CHEM3013
Degree programme
Kemiantekniikan kandidaattiohjelma
Language
fi
Pages
20
Series
Description
Supervisor
Rautkari, Lauri
Thesis advisor
Santasalo-Aarnio, Annukka
Keywords
ohutkulta, pinnoitus, piikarbidi, puolijohde, CVD, IBED
Other note
Citation