Effect of transition metals on oxygen precipitation in silicon

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorTalvitie, Heli
dc.contributor.authorHaarahiltunen, Antti
dc.contributor.authorYli-Koski, Marko
dc.contributor.authorSavin, Hele
dc.contributor.authorSinkkonen, Juha
dc.contributor.departmentDepartment of Micro and Nanosciencesen
dc.contributor.groupauthorHele Savin Groupen
dc.date.accessioned2025-10-08T07:09:33Z
dc.date.available2025-10-08T07:09:33Z
dc.date.issued2008
dc.description.versionPeer revieweden
dc.format.mimetypeapplication/pdf
dc.identifier.citationTalvitie, H, Haarahiltunen, A, Yli-Koski, M, Savin, H & Sinkkonen, J 2008, Effect of transition metals on oxygen precipitation in silicon. in International Conference on Nanoscience and Technology. vol. 100, Journal of Physics: Conference Series, Institute of Physics Publishing, International Conference on Nanoscience and Technology, Stockholm, Sweden, 02/07/2007. https://doi.org/10.1088/1742-6596/100/7/072045en
dc.identifier.doi10.1088/1742-6596/100/7/072045
dc.identifier.issn1742-6596
dc.identifier.otherPURE UUID: 894c3d43-8c47-484c-a594-09086b890c00
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/894c3d43-8c47-484c-a594-09086b890c00
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/133847233/savin_effect_of_transition_2008.pdf
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/139698
dc.identifier.urnURN:NBN:fi:aalto-202510087879
dc.language.isoenen
dc.relation.ispartofInternational Conference on Nanoscience and Technologyen
dc.relation.ispartofseriesInternational Conference on Nanoscience and Technologyen
dc.relation.ispartofseriesVolume 100en
dc.relation.ispartofseriesJournal of Physics: Conference Seriesen
dc.rightsopenAccessen
dc.rightsCC BY
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subject.keywordoxygen
dc.subject.keywordsilicon
dc.subject.keywordtransition metals
dc.titleEffect of transition metals on oxygen precipitation in siliconen
dc.typeA4 Artikkeli konferenssijulkaisussafi
dc.type.versionpublishedVersion

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