Nanomechanical Resonators for Cryogenic Research

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Volume Title

A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Date

2018-12-17

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Mcode

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Language

en

Pages

10

Series

Journal of Low Temperature Physics

Abstract

Suspended aluminum nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured at 4.2 K temperature in vacuum and low-pressure 4He gas. At low oscillation amplitudes, the resonance response is linear, producing Lorentzian line shapes, and Q values up to 4400 have been achieved. At higher oscillation amplitudes, the devices show nonlinear Duffing-like behavior. The devices are found to be extremely sensitive to pressure in 4He gas. Such device is a promising tool for studying properties of superfluid helium.

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Keywords

He, NEMS, Quantized vortices, Sensors

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Citation

Kamppinen, T & Eltsov, V B 2018, 'Nanomechanical Resonators for Cryogenic Research', Journal of Low Temperature Physics. https://doi.org/10.1007/s10909-018-02124-z