Metal Contamination in Silicon Epitaxy

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Journal Title

Journal ISSN

Volume Title

Helsinki University of Technology | Diplomityö
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Authors

Date

2001

Department

Materiaali- ja kalliotekniikan osasto

Major/Subject

Metalli- ja materiaalioppi

Mcode

Mak-45

Degree programme

Language

en

Pages

67+18

Series

Description

Supervisor

Lindroos, Veikko

Thesis advisor

Airaksinen, Veli-Matti
Haimi, Eero

Keywords

Other note

Citation

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-2020120448298

Collections

[dipl] Teknillinen korkeakoulu / TKK