Characterization of energy trapping in a bulk acoustic wave resonator

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Journal Title
Journal ISSN
Volume Title
School of Science | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2010
Major/Subject
Mcode
Degree programme
Language
en
Pages
233507
Series
Applied Physics Letters, Volume 97, Issue 23
Abstract
Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acoustic waveresonator, and around it in the surrounding region, are measured using a heterodyne laser interferometer. Plate-wave dispersion diagrams for both regions are extracted from the measurement data. The experimental dispersion data reveal the cutoff frequencies of the acoustic vibration modes in the region surrounding the resonator, and, therefore, the energy trapping range of the resonator can readily be determined. The measureddispersionproperties of the surrounding region, together with the abruptly diminishing amplitude of the dispersion curves in the resonator, signal the onset of acoustic leakage from the resonator. This information is important for verifying and further developing the simulation tools used for the design of the resonators. Experimental wave field images, dispersion diagrams for both regions, and the threshold for energy leakage are discussed.
Description
Keywords
acoustic resonance, dispersion, acoustic waves, electrodes, acoustical measurements, bulk acoustic wave resonators, BAW resonators
Other note
Citation
Kokkonen, Kimmo & Meltaus, Johanna & Pensala, Tuomas & Kaivola, Matti. 2010. Characterization of energy trapping in a bulk acoustic wave resonator. Applied Physics Letters. Volume 97, Issue 23. ISSN 0003-6951 (printed). DOI: 10.1063/1.3521263.