Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives

dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorLiimatainen, Ville
dc.contributor.authorVirta, Antti
dc.contributor.authorRouta, Iiris
dc.contributor.authorZhou, Quan
dc.contributor.departmentSähkötekniikan ja automaation laitosfi
dc.contributor.departmentDepartment of Electrical Engineering and Automationen
dc.contributor.labMicro- and Nanorobotics groupen
dc.contributor.labMikro- ja nanorobotiikan ryhmäfi
dc.contributor.schoolSähkötekniikan korkeakoulufi
dc.contributor.schoolSchool of Electrical Engineeringen
dc.date.accessioned2016-02-10T10:01:19Z
dc.date.available2016-02-10T10:01:19Z
dc.date.issued2014
dc.description.versionPeer revieweden
dc.format.extent6
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLiimatainen, Ville & Virta, Antti & Routa, Iiris & Zhou, Quan. 2014. Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives. Micronano System Workshop (MSW 2014). 6.en
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/19639
dc.identifier.urnURN:NBN:fi:aalto-201602091254
dc.language.isoenen
dc.publisherMicronano System Workshopen
dc.relation.ispartofMicronano System Workshop (MSW 2014)en
dc.rights© 2014 Authors.en
dc.rights.holderAuthors
dc.subject.keywordmicromanipulationen
dc.subject.keywordmicroassemblyen
dc.subject.keywordESEMen
dc.subject.otherAutomationen
dc.titleHybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesivesen
dc.typeA4 Artikkeli konferenssijulkaisussafi
dc.type.dcmitypetexten
dc.type.versionFinal published versionen
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