Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives

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Journal Title
Journal ISSN
Volume Title
School of Electrical Engineering | A4 Artikkeli konferenssijulkaisussa
Date
2014
Major/Subject
Mcode
Degree programme
Language
en
Pages
6
Series
Description
Keywords
micromanipulation, microassembly, ESEM
Other note
Citation
Liimatainen, Ville & Virta, Antti & Routa, Iiris & Zhou, Quan. 2014. Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives. Micronano System Workshop (MSW 2014). 6.