Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives

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© 2014 Authors.
Final published version

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Journal Title

Journal ISSN

Volume Title

School of Electrical Engineering | A4 Artikkeli konferenssijulkaisussa

Date

2014

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Mcode

Degree programme

Language

en

Pages

6

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Description

Keywords

micromanipulation, microassembly, ESEM

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Citation

Liimatainen, Ville & Virta, Antti & Routa, Iiris & Zhou, Quan. 2014. Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives. Micronano System Workshop (MSW 2014). 6.