The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

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Funding Information: ACKNOWLEDGMENT This work was financially supported by the Academy of Finland under grant MilliRAD, number 314541. The authors would like to thank I. Huhtinen for the RF measurements. Publisher Copyright: © 2022 European Microwave Association.

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antenna, gradient index, lens, passivation, silicon, THz

DOI

10.23919/EuMC50147.2022.9784285

Citation

Lamminen, A, Tamminen, A, Saarilahti, J, Ermolov, V & Pursula, P 2022, The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens . in 2021 51st European Microwave Conference, EuMC 2021 . European Microwave Association, pp. 873-876, European Microwave Conference, London, United Kingdom, 04/06/2022 . https://doi.org/10.23919/EuMC50147.2022.9784285

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https://urn.fi/URN:NBN:fi:aalto-202208104748

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[article-cris] Sähkötekniikan korkeakoulu / ELEC

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The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

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