Reaktiivisen ionisyväetsauksen tuplamaskausprosessin optimointi
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School of Chemical Engineering |
Master's thesis
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Instructions for the author
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Date
2010
Department
Major/Subject
Elektroniikan valmistustekniikka
Mcode
S-113
Degree programme
Language
fi
Pages
viii + 84 + [9]
Series
Description
Supervisor
Paulasto-Kröckel, MerviThesis advisor
Savolainen, KariKeywords
DRIE, DRIE, 2-level masking, tuplamaskaus, Si residual, piijäämä, Bosch process, Bosch-prosessi