Reaktiivisen ionisyväetsauksen tuplamaskausprosessin optimointi

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Volume Title

School of Chemical Engineering | Master's thesis
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Authors

Date

2010

Department

Kemian ja materiaalitieteiden tiedekunta

Major/Subject

Elektroniikan valmistustekniikka

Mcode

S-113

Degree programme

Language

fi

Pages

viii + 84 + [9]

Series

Description

Supervisor

Paulasto-Kröckel, Mervi

Thesis advisor

Savolainen, Kari

Keywords

DRIE, DRIE, 2-level masking, tuplamaskaus, Si residual, piijäämä, Bosch process, Bosch-prosessi

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Citation

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-2020122357964

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[dipl] Kemian tekniikan korkeakoulu / CHEM