Black Silicon

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Journal Title
Journal ISSN
Volume Title
A3 Kirjan tai muun kokoomateoksen osa
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Author
Date
2020-04-24
Department
Department of Electronics and Nanoengineering
Major/Subject
Mcode
Degree programme
Language
en
Pages
186-196
Series
Handbook of Silicon Based MEMS Materials and Technologies, issue 3, Micro & Nano Technologies
Description
Keywords
Other note
DOI
10.1016/B978-0-12-817786-0.00006-2
Citation
Pasanen, T 2020, Black Silicon . in Handbook of Silicon Based MEMS Materials and Technologies . 3 edn, Part I, Micro & Nano Technologies, Elsevier, pp. 186-196 . https://doi.org/10.1016/B978-0-12-817786-0.00006-2
Permanent link to this item
https://urn.fi/URN:NBN:fi:aalto-202008064455
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[article-cris] Sähkötekniikan korkeakoulu / ELEC