FEM-Modelling of gas-structure interaction in MEMS

Helsinki University of Technology | Licentiate thesis

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Authors

Junttila, Virpi

Date

Department

Sähkö- ja tietoliikennetekniikan osasto

Major/Subject

Laskennallinen tekniikka

Mcode

S-114

Language

en

Pages

102

Supervisor

Kaski, Kimmo

Thesis advisor

Hietanen, Jarmo

Keywords

MEMS, MEMS, FEM, FEM, gas-structure interactions, kaasu-rakenne vuorovaikutus, harmonic vibration, harmoninen värähtely, damping, vaimennus, perforation, rei'itetyt kalvot, ,

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-202104155631

Collections

[lic] Teknillinen korkeakoulu / TKK

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