FEM-Modelling of gas-structure interaction in MEMS
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Helsinki University of Technology |
Licentiate thesis
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Instructions for the author
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Date
2003
Department
Major/Subject
Laskennallinen tekniikka
Mcode
S-114
Degree programme
Language
en
Pages
102
Series
Description
Supervisor
Kaski, KimmoThesis advisor
Hietanen, JarmoKeywords
MEMS, MEMS, FEM, FEM, gas-structure interactions, kaasu-rakenne vuorovaikutus, harmonic vibration, harmoninen värähtely, damping, vaimennus, perforation, rei'itetyt kalvot, ,