MEMS thin film adhesion testing
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URL
Journal Title
Journal ISSN
Volume Title
School of Electrical Engineering |
Authors
Date
2011
Department
Major/Subject
Optiikka ja molekyylimateriaalit
Mcode
S-129
Degree programme
Language
en
Pages
71 s. + liitt. 7
Series
Description
Supervisor
Franssila, SamiThesis advisor
Grigoras, KestutisKeywords
thin film materials, identation, Young's modulus, hardness