MEMS thin film adhesion testing

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URL

Journal Title

Journal ISSN

Volume Title

School of Electrical Engineering |

Authors

Date

2011

Department

Mikro- ja nanotekniikan laitos

Major/Subject

Optiikka ja molekyylimateriaalit

Mcode

S-129

Degree programme

Language

en

Pages

71 s. + liitt. 7

Series

Description

Supervisor

Franssila, Sami

Thesis advisor

Grigoras, Kestutis

Keywords

thin film materials, identation, Young's modulus, hardness

Other note

Citation

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-202108318736

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[final] Final projects