Coupled micromechanical silicon resonators for high frequencies
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Helsinki University of Technology |
Licentiate thesis
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Instructions for the author
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Date
2002
Department
Major/Subject
Mittaustekniikka
Mcode
S-108
Degree programme
Language
en
Pages
91
Series
Description
Supervisor
Tittonen, IlkkaThesis advisor
Oja, AarneKeywords
RF-MEMS, RF-resonator, electromechanical coupling, micromechanics, coupled systems