Plasma Etching for MEMS Devices

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Journal Title
Journal ISSN
Volume Title
Sähkötekniikan korkeakoulu | Bachelor's thesis
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Author
Date
2018-05-09
Department
Major/Subject
Elektroniikka ja sähkötekniikka
Mcode
ELEC3013
Degree programme
Sähkötekniikan kandidaattiohjelma
Language
en
Pages
24
Series
Description
Supervisor
Turunen, Markus
Thesis advisor
Isakov, Kirill
Keywords
plasma, MEMS, etching
Other note
Citation
Permanent link to this item
https://urn.fi/URN:NBN:fi:aalto-201806053168
Collections
[kand] Sähkötekniikan korkeakoulu / ELEC