Investigation of Conductive ZnO/Al2O3 Nanolaminates grown by Atomic Layer Deposition

Simple item page
dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.advisorTiilikainen, Jouni 
dc.contributor.authorXu, Tingmo
dc.contributor.departmentSähkö- ja tietoliikennetekniikan osastofi
dc.contributor.schoolTeknillinen korkeakoulufi
dc.contributor.schoolHelsinki University of Technologyen
dc.contributor.supervisorHakkarainen, Teppo 
dc.date.accessioned2020-12-05T11:10:08Z
dc.date.available2020-12-05T11:10:08Z
dc.date.issued2007 
dc.format.extentv + 49 
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/95194
dc.identifier.urnURN:NBN:fi:aalto-2020120554028
dc.language.isoenen
dc.programme.majorOptiikka ja molekyylimateriaalitfi
dc.programme.mcodeS-129fi
dc.rights.accesslevelclosedAccess
dc.subject.keywordaluminium oxideen
dc.subject.keywordatomic layer depositionen
dc.subject.keywordnanolaminatesen
dc.subject.keywordTMLen
dc.subject.keywordX-ray reflectivityen
dc.subject.keywordzinc oxideen
dc.titleInvestigation of Conductive ZnO/Al2O3 Nanolaminates grown by Atomic Layer Depositionen
dc.type.okmG2 Pro gradu, diplomityö 
dc.type.ontasotMaster's thesisen
dc.type.ontasotPro gradu -tutkielmafi
dc.type.publicationmasterThesis 
local.aalto.digiauthask
local.aalto.digifolderAalto_38459
local.aalto.idinssi35303
local.aalto.inssilocationP1 Ark S80
local.aalto.openaccessno

Files

Collections

[dipl] Teknillinen korkeakoulu / TKK