Investigation of Conductive ZnO/Al2O3 Nanolaminates grown by Atomic Layer Deposition

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Helsinki University of Technology | Master's thesis
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P1 Ark S80

Authors

Date

2007

Department

Sähkö- ja tietoliikennetekniikan osasto

Major/Subject

Optiikka ja molekyylimateriaalit

Mcode

S-129

Degree programme

Language

en

Pages

v + 49

Series

Description

Supervisor

Hakkarainen, Teppo

Thesis advisor

Tiilikainen, Jouni

Keywords

aluminium oxide, atomic layer deposition, nanolaminates, TML, X-ray reflectivity, zinc oxide

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https://urn.fi/URN:NBN:fi:aalto-2020120554028

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[dipl] Teknillinen korkeakoulu / TKK