Investigation of Conductive ZnO/Al2O3 Nanolaminates grown by Atomic Layer Deposition
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Helsinki University of Technology |
Diplomityö
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Date
2007
Department
Major/Subject
Optiikka ja molekyylimateriaalit
Mcode
S-129
Degree programme
Language
en
Pages
v + 49
Series
Description
Supervisor
Hakkarainen, TeppoThesis advisor
Tiilikainen, JouniKeywords
aluminium oxide, atomic layer deposition, nanolaminates, TML, X-ray reflectivity, zinc oxide