Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorKokkonen, Kimmo
dc.contributor.authorKaivola, Matti
dc.contributor.departmentTeknillisen fysiikan laitosfi
dc.contributor.departmentDepartment of Applied Physicsen
dc.contributor.schoolPerustieteiden korkeakoulufi
dc.contributor.schoolSchool of Scienceen
dc.date.accessioned2015-05-20T09:00:56Z
dc.date.available2015-05-20T09:00:56Z
dc.date.issued2008
dc.description.abstractWe describe a scanning heterodyneinterferometer for imaging surface vibrations with a wide frequency range, with current electronics, up to 6GHz. The heterodyne operation facilitates measurement of absolute amplitude and phase of the surface vibration without calibration. Currently, the setup allows detection of vibration amplitudes down to ∼1pm with a lateral resolution of <1μm. The interferometer is designed to accommodate the different sample types, e.g., surface and bulk acoustic wave devices and micromechanical resonators. The absolute-amplitude and phase information allows for a thorough characterization of surface vibrations in such components and provides direct information of the vibration fields not obtainable via electrical measurements.inen
dc.description.versionPeer revieweden
dc.format.extent063502
dc.format.mimetypeapplication/pdfen
dc.identifier.citationKokkonen, Kimmo & Kaivola, Matti. 2008. Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations. Applied Physics Letters. Volume 92, Issue 6. 063502. ISSN 0003-6951 (printed). DOI: 10.1063/1.2840183.en
dc.identifier.doi10.1063/1.2840183
dc.identifier.issn0003-6951 (printed)
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/16110
dc.identifier.urnURN:NBN:fi:aalto-201505192754
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.ispartofseriesApplied Physics Lettersen
dc.relation.ispartofseriesVolume 92, Issue 6
dc.rights© 2008 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/aplen
dc.rights.holderAmerican Intitute of Physics (AIP)
dc.subject.keywordinterferometersen
dc.subject.keywordheterodyne detectorsen
dc.subject.keywordmicroelectromechanical systemsen
dc.subject.keywordvibration testingen
dc.subject.keywordsurface acoustic wavesen
dc.subject.keywordsurface vibrationsen
dc.subject.keywordscanning heterodyne laser interferometeren
dc.subject.otherPhysicsen
dc.titleScanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrationsen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.dcmitypetexten
dc.type.versionFinal published versionen

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