Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations
Loading...
Access rights
© 2008 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/apl
Final published version
URL
Journal Title
Journal ISSN
Volume Title
School of Science |
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Unless otherwise stated, all rights belong to the author. You may download, display and print this publication for Your own personal use. Commercial use is prohibited.
Authors
Date
2008
Major/Subject
Mcode
Degree programme
Language
en
Pages
063502
Series
Applied Physics Letters, Volume 92, Issue 6
Abstract
We describe a scanning heterodyneinterferometer for imaging surface vibrations with a wide frequency range, with current electronics, up to 6GHz. The heterodyne operation facilitates measurement of absolute amplitude and phase of the surface vibration without calibration. Currently, the setup allows detection of vibration amplitudes down to ∼1pm with a lateral resolution of <1μm. The interferometer is designed to accommodate the different sample types, e.g., surface and bulk acoustic wave devices and micromechanical resonators. The absolute-amplitude and phase information allows for a thorough characterization of surface vibrations in such components and provides direct information of the vibration fields not obtainable via electrical measurements.inDescription
Keywords
interferometers, heterodyne detectors, microelectromechanical systems, vibration testing, surface acoustic waves, surface vibrations, scanning heterodyne laser interferometer
Other note
Citation
Kokkonen, Kimmo & Kaivola, Matti. 2008. Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations. Applied Physics Letters. Volume 92, Issue 6. 063502. ISSN 0003-6951 (printed). DOI: 10.1063/1.2840183.