Galliumarsenidi-MESFET:n valmistus ja ominaisuuksien tutkiminen
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Helsinki University of Technology |
Diplomityö
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Instructions for the author
Authors
Date
1990
Department
Major/Subject
Elektronifysiikka
Mcode
Ele-69
Degree programme
Language
fi
Pages
102
Series
Description
Supervisor
Sinkkonen, JuhaThesis advisor
Suni, IlkkaKeywords
GaAs, ioni-istutus, MESFET, RTA, RTP, ion implantation