Galliumarsenidi-MESFET:n valmistus ja ominaisuuksien tutkiminen

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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology | Diplomityö
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Date
1990
Major/Subject
Elektronifysiikka
Mcode
Ele-69
Degree programme
Language
fi
Pages
102
Series
Description
Supervisor
Sinkkonen, Juha
Thesis advisor
Suni, Ilkka
Keywords
GaAs, ioni-istutus, MESFET, RTA, RTP, ion implantation
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