Optimization in wet chemistry for surface preparation of InP substrate- sulfur passivation
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URL
Journal Title
Journal ISSN
Volume Title
Kemian tekniikan korkeakoulu |
Master's thesis
Authors
Date
2023-08-22
Department
Major/Subject
Functional Materials for Global Challenges
Mcode
CHEM3061
Degree programme
Master's Programme in Advanced Materials for Innovation and Sustainability
Language
en
Pages
36
Series
Description
Supervisor
Jokinen, VilleThesis advisor
Lumineau, VictorPoloni, Roberta
Keywords
InP, sulfuric passivation, (NH4)2Saq, contact angle, TXRF, ellipsometry