Aluminum gate NMOS process and device design, and fabrication
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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology |
Licentiate thesis
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Instructions for the author
Instructions for the author
Author
Date
1999
Department
Major/Subject
Elektronifysiikka
Mcode
S-69
Degree programme
Language
en
Pages
68
Series
Description
Supervisor
Kuivalainen, PekkaKeywords
process integration, prosessi integrointi, IC-fabrication technology, IC-valmistusteknologiat, aluminum gate NMOS, alumiinihila NMOS