Lasi paineanturin materiaalina

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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology | Diplomityö
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Date
2001
Major/Subject
Mittaustekniikka
Mcode
S-108
Degree programme
Language
fi
Pages
viii + 90
Series
Description
Supervisor
Tittonen, Ilkka
Thesis advisor
Salo, Toni
Keywords
glass in micromechanics, lasi mikromekaniikassa, glass-to-glass anodic bonding, lasi-lasi -anodinen bondaus, glass-to-metal anodic bonding, lasi-metalli -anodinen bondaus, capacitive pressure sensor, kapasitiivinen paineanturi
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Citation