Huokoinen pii pyromems materiaalina
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School of Chemical Engineering |
Master's thesis
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Instructions for the author
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Date
2010
Department
Major/Subject
Elektronifysiikka
Mcode
S-69
Degree programme
Language
fi
Pages
vii + 57 + [9]
Series
Description
Supervisor
Franssila, SamiThesis advisor
Grigoras, KestasKeywords
porous silicon, huokoinen pii, PyroMEMS, PyroMEMS, electrochemical etching of silicon, piin sähkökemiallinen etsaus, nanoenergetics, nanoenergetiikka