Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorRontu, Villeen_US
dc.contributor.authorNolvi, Antonen_US
dc.contributor.authorHokkanen, Arien_US
dc.contributor.authorHaeggstrom, Edwarden_US
dc.contributor.authorKassamakov, Ivanen_US
dc.contributor.authorFranssila, Samien_US
dc.contributor.departmentDepartment of Chemistry and Materials Scienceen
dc.contributor.departmentAalto Nanofaben
dc.contributor.groupauthorMicrofabricationen
dc.contributor.organizationUniversity of Helsinkien_US
dc.date.accessioned2019-05-06T09:11:07Z
dc.date.available2019-05-06T09:11:07Z
dc.date.embargoinfo:eu-repo/date/embargoEnd/2019-04-19en_US
dc.date.issued2018-04en_US
dc.description.abstractWe have investigated elastic and fracture properties of amorphous Al2O3 thin films deposited by atomic layer deposition (ALD) with bulge test technique using a free-standing thin film membrane and extended applicability of bulge test technique. Elastic modulus was determined to be 115 GPa for a 50 nm thick film and 170 GPa for a 15 nm thick film. Residual stress was 142 MPa in the 50 nm Al2O3 film while it was 116 MPa in the 15 nm Al2O3 film. Density was 3.11 g cm(-3) for the 50 nm film and 3.28 g cm(-3) for the 15 nm film. Fracture strength at 100 hPa s(-1) pressure ramp rate was 1.72 GPa for the 50 nm film while for the 15 nm film it was 4.21 GPa, almost 2.5-fold. Fracture strength was observed to be positively strain-rate dependent. Weibull moduli of these films were very high being around 50. The effective volume of a circular film in bulge test was determined from a FEM model enabling future comparison of fracture strength data between different techniques.en
dc.description.versionPeer revieweden
dc.format.extent10
dc.format.mimetypeapplication/pdfen_US
dc.identifier.citationRontu, V, Nolvi, A, Hokkanen, A, Haeggstrom, E, Kassamakov, I & Franssila, S 2018, ' Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test ', Materials Research Express, vol. 5, no. 4, 046411 . https://doi.org/10.1088/2053-1591/aabbd5en
dc.identifier.doi10.1088/2053-1591/aabbd5en_US
dc.identifier.issn2053-1591
dc.identifier.otherPURE UUID: 4e264257-a896-42ae-8bed-6e47132f7df4en_US
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/4e264257-a896-42ae-8bed-6e47132f7df4en_US
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/32961873/CHEM_Rontu_et_al_Elastic_fracture_properties_2018_Materials_Research_Express.pdfen_US
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/37658
dc.identifier.urnURN:NBN:fi:aalto-201905062778
dc.language.isoenen
dc.publisherIOP PUBLISHING LTD
dc.relation.ispartofseriesMaterials Research Expressen
dc.relation.ispartofseriesVolume 5, issue 4en
dc.rightsopenAccessen
dc.subject.keywordatomic layer depositionen_US
dc.subject.keywordbulge testingen_US
dc.subject.keywordmechanical propertiesen_US
dc.subject.keywordmembraneen_US
dc.subject.keywordfracture strengthen_US
dc.subject.keywordATOMIC LAYER DEPOSITIONen_US
dc.subject.keywordALUMINUM-OXIDEen_US
dc.subject.keywordTHERMOMECHANICAL PROPERTIESen_US
dc.subject.keywordSILICAen_US
dc.subject.keywordSTRESSen_US
dc.subject.keywordSTRENGTHen_US
dc.subject.keywordMODULUSen_US
dc.subject.keywordMASKen_US
dc.titleElastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge testen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
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