Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Date
2018-04
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Mcode
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Language
en
Pages
10
Series
Materials Research Express, Volume 5, issue 4
Abstract
We have investigated elastic and fracture properties of amorphous Al2O3 thin films deposited by atomic layer deposition (ALD) with bulge test technique using a free-standing thin film membrane and extended applicability of bulge test technique. Elastic modulus was determined to be 115 GPa for a 50 nm thick film and 170 GPa for a 15 nm thick film. Residual stress was 142 MPa in the 50 nm Al2O3 film while it was 116 MPa in the 15 nm Al2O3 film. Density was 3.11 g cm(-3) for the 50 nm film and 3.28 g cm(-3) for the 15 nm film. Fracture strength at 100 hPa s(-1) pressure ramp rate was 1.72 GPa for the 50 nm film while for the 15 nm film it was 4.21 GPa, almost 2.5-fold. Fracture strength was observed to be positively strain-rate dependent. Weibull moduli of these films were very high being around 50. The effective volume of a circular film in bulge test was determined from a FEM model enabling future comparison of fracture strength data between different techniques.
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Keywords
atomic layer deposition, bulge testing, mechanical properties, membrane, fracture strength, ATOMIC LAYER DEPOSITION, ALUMINUM-OXIDE, THERMOMECHANICAL PROPERTIES, SILICA, STRESS, STRENGTH, MODULUS, MASK
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Citation
Rontu , V , Nolvi , A , Hokkanen , A , Haeggstrom , E , Kassamakov , I & Franssila , S 2018 , ' Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test ' , Materials Research Express , vol. 5 , no. 4 , 046411 . https://doi.org/10.1088/2053-1591/aabbd5