Embrittlement of Polysilicon Thin Films Under a Corrosive Atmosphere
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URL
Journal Title
Journal ISSN
Volume Title
Sähkötekniikan korkeakoulu |
Master's thesis
Authors
Date
2013-11-18
Department
Major/Subject
Elektroniikan integrointi ja luotettavuus
Mcode
S-113
Degree programme
EST - Elektroniikka ja sähkötekniikka
Language
en
Pages
90+7
Series
Description
Supervisor
Paulasto-Kröckel, MerviThesis advisor
Mattila, ToniKeywords
polysilicon, silicon nitride, MEMS, embrittlement, thin film, reliability testing, nanoindentation, TEM, XPS