Embrittlement of Polysilicon Thin Films Under a Corrosive Atmosphere

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Journal Title

Journal ISSN

Volume Title

Sähkötekniikan korkeakoulu | Master's thesis

Date

2013-11-18

Department

Major/Subject

Elektroniikan integrointi ja luotettavuus

Mcode

S-113

Degree programme

EST - Elektroniikka ja sähkötekniikka

Language

en

Pages

90+7

Series

Description

Supervisor

Paulasto-Kröckel, Mervi

Thesis advisor

Mattila, Toni

Keywords

polysilicon, silicon nitride, MEMS, embrittlement, thin film, reliability testing, nanoindentation, TEM, XPS

Other note

Citation