Characterization and comparison of lithography machines for MEMS production

Thumbnail Image

URL

Journal Title

Journal ISSN

Volume Title

Kemian tekniikan korkeakoulu | Master's thesis

Authors

Date

2019-08-20

Department

Major/Subject

Functional Materials

Mcode

CHEM3025

Degree programme

Master's Programme in Chemical, Biochemical and Materials Engineering

Language

en

Pages

78+13

Series

Description

Supervisor

Franssila, Sami

Thesis advisor

Dekker, James

Keywords

lithography, stepper, linewidth, reduction, small numerical aperture

Other note

Citation

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-201908254951

Collections

[dipl] Kemian tekniikan korkeakoulu / CHEM