Characterization and comparison of lithography machines for MEMS production

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Journal Title
Journal ISSN
Volume Title
Kemian tekniikan korkeakoulu | Master's thesis
Date
2019-08-20
Department
Major/Subject
Functional Materials
Mcode
CHEM3025
Degree programme
Master's Programme in Chemical, Biochemical and Materials Engineering
Language
en
Pages
78+13
Series
Description
Supervisor
Franssila, Sami
Thesis advisor
Dekker, James
Keywords
lithography, stepper, linewidth, reduction, small numerical aperture
Other note
Citation