Mixed-Anion Compounds

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Journal Title
Journal ISSN
Volume Title
A2 Katsausartikkeli tieteellisessä aikakauslehdessä
Date
2021-06-09
Major/Subject
Mcode
Degree programme
Language
en
Pages
14
Series
Advanced Materials Interfaces, Volume 8, issue 11
Abstract
For decades the most successful approach towards new inorganic material innovations for next-generation devices has been to manipulate the cation composition. As this cation-centric material development is inevitably approaching its saturation, new chemistries are needed to maintain the pace of technological progress. One of the new chemistry approaches is to play with the anions instead of the cations. Moreover, advances in fabrication techniques are needed to address the endeavors to shrink the device and component dimensions. Here, the combination of mixed-anion chemistries, such as oxychalcogenides or carbopnictides, and the state-of-the-art atomic layer deposition (ALD) thin-film technology are highlighted. The unique bottom-up material building mode of ALD can lead to scientifically exciting but at the same time industry-feasible material innovations. In this brief review, the present status and prospects, and the challenges of this emerging field are discussed.
Description
Publisher Copyright: © 2021 Wiley-VCH GmbH Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
Keywords
atomic layer deposition, carbonitride, mixed-anion compound, oxyhalide, oxypnictide, oxysulfide, thin-film technology
Other note
Citation
Tripathi , T S & Karppinen , M 2021 , ' Mixed-Anion Compounds : An Unexplored Playground for ALD Fabrication ' , Advanced Materials Interfaces , vol. 8 , no. 11 , 2100146 . https://doi.org/10.1002/admi.202100146