Oksidiohutkalvojen valmistus FCVAD- ja HiPIMS-menetelmillä sekä niihin liittyvät ongelmat

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Journal Title

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Volume Title

Kemiantekniikan korkeakoulu | Bachelor's thesis
Electronic archive copy is available locally at the Harald Herlin Learning Centre. The staff of Aalto University has access to the electronic bachelor's theses by logging into Aaltodoc with their personal Aalto user ID. Read more about the availability of the bachelor's theses.

Date

2015-04-29

Department

Major/Subject

Soveltava materiaalitiede

Mcode

MT3001

Degree programme

Materiaalitekniikka MTE

Language

fi

Pages

22

Series

Description

Supervisor

Forsén, Olof

Thesis advisor

Korhonen, Antti

Keywords

oksidiohutkalvo, HiPIMS, FCVAD, PVD, alumiinioksidi, titaanioksidi

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