Atomic layer deposition of ZnO thin films on functional surfaces

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Volume Title

Helsinki University of Technology | Diplomityö
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Date

2007

Major/Subject

Epäorgaaninen kemia

Mcode

Kem-35

Degree programme

Language

en

Pages

vii + 76

Series

Description

Supervisor

Karppinen, Maarit

Thesis advisor

Malm, Jari

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