Application of machine learning in microelectromechanical systems (MEMS) manufacturing

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Journal Title

Journal ISSN

Volume Title

Insinööritieteiden korkeakoulu | Master's thesis

Date

2020-01-20

Department

Major/Subject

Mcode

Degree programme

Master's Programme in Geoinformatics (GIS)

Language

en

Pages

74+7

Series

Description

Supervisor

Ilin, Alexander

Thesis advisor

Bogdanoff, Ulla

Keywords

micro-electromechanical system, machine learning, gradient boosting decision trees, convolutional neural network, interpretable machine learning, deep learning

Other note

Citation