The new method for MEMS microphones reliability evaluating - Case study of corrosive environments
| dc.contributor | Aalto-yliopisto | fi |
| dc.contributor | Aalto University | en |
| dc.contributor.advisor | Mattila, Toni | |
| dc.contributor.author | Raami, Jani | |
| dc.contributor.department | Elektroniikan laitos | fi |
| dc.contributor.school | Sähkötekniikan korkeakoulu | fi |
| dc.contributor.school | School of Electrical Engineering | en |
| dc.contributor.supervisor | Paulasto-Kröckel, Mervi | |
| dc.date.accessioned | 2020-12-28T10:18:19Z | |
| dc.date.available | 2020-12-28T10:18:19Z | |
| dc.date.issued | 2012 | |
| dc.format.extent | ix + 92 s. + liitt. 8 | |
| dc.identifier.uri | https://aaltodoc.aalto.fi/handle/123456789/100104 | |
| dc.identifier.urn | URN:NBN:fi:aalto-2020122858935 | |
| dc.language.iso | fi | en |
| dc.programme.major | Elektroniikan valmistustekniikka | fi |
| dc.programme.mcode | S-113 | fi |
| dc.rights.accesslevel | closedAccess | |
| dc.subject.keyword | capacitive MEMS microphone | en |
| dc.subject.keyword | kapasitiivinen MEMS-mikrofoni | fi |
| dc.subject.keyword | reliability | en |
| dc.subject.keyword | luotettavuus | fi |
| dc.subject.keyword | mixed flowing gas test | en |
| dc.subject.keyword | korroosiotesti | fi |
| dc.subject.keyword | corrosion test | en |
| dc.subject.keyword | monikaasutesti | fi |
| dc.title | The new method for MEMS microphones reliability evaluating - Case study of corrosive environments | en |
| dc.title | Uusi menetelmä MEMS-mikrofonien luotettavuuskarakterisointiin - tapaustutkimus korrodoivista ympäristöistä | fi |
| dc.type.okm | G2 Pro gradu, diplomityö | |
| dc.type.ontasot | Master's thesis | en |
| dc.type.ontasot | Pro gradu -tutkielma | fi |
| dc.type.publication | masterThesis | |
| local.aalto.digiauth | ask | |
| local.aalto.digifolder | Aalto_05901 | |
| local.aalto.idinssi | 45010 | |
| local.aalto.openaccess | no |