Stroboscopic white-light interferometry of vibrating microstructures
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Date
2013
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Language
en
Pages
7
Series
Optics Express, Volume 21, issue 14, pp. 16901-16907
Abstract
We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.Description
Keywords
Imaging systems, Instrumentation, measurement, and metrology, Interference microscopy, Interferometric imaging, Surface dynamics
Other note
Citation
Shavrin, I, Lipiäinen, L, Kokkonen, K, Novotny, S, Kaivola, M & Ludvigsen, H 2013, ' Stroboscopic white-light interferometry of vibrating microstructures ', Optics Express, vol. 21, no. 14, pp. 16901-16907 . https://doi.org/10.1364/OE.21.016901