Hapen aiheuttamat kidevirheet ja sisäinen getterointi CZ-piikiekoissa
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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology |
Diplomityö
Checking the digitized thesis and permission for publishing
Instructions for the author
Instructions for the author
Authors
Date
1985
Department
Major/Subject
Elektronifysiikka
Mcode
01.69
Degree programme
Language
fi
Pages
79
Series
Description
Supervisor
Sinkkonen, JuhaKeywords
czochralski-pii, happi, kidevirheet, virhe-etsaus, sisäinen getterointi