Buried ion implanted layer in bonded silicon-on-insulator wafers

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master_Honkanen_Jenni_2011.pdf (30.8 MB)

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Volume Title

School of Chemical Engineering | Master's thesis
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Authors

Date

2011

Department

Materiaalitekniikan laitos

Major/Subject

Materiaalitiede

Mcode

MT-45

Degree programme

Language

en

Pages

viii + 91

Series

Description

Supervisor

Hannula, Simo-Pekka

Thesis advisor

Haimi, Eero
Mäkinen, Jari

Keywords

ion implantation, ioni-istutus, bonding, bondaus, silicon-on-insulator, SOI kiekot

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https://urn.fi/URN:NBN:fi:aalto-2020122358596

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[dipl] Kemian tekniikan korkeakoulu / CHEM