Atomic Layer Etching in the Semiconductor Industry

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Kemiantekniikan korkeakoulu | Bachelor's thesis
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Date
2019-12-07
Department
Major/Subject
Bio- ja kemiantekniikka
Mcode
CHEM3012
Degree programme
Kemiantekniikan kandidaattiohjelma
Language
en
Pages
19
Series
Description
Supervisor
Rautkari, Lauri
Thesis advisor
Franssila, Sami
Keywords
atomic layer etching, ALE, semiconductors, plasma etching, atomikerrosetsaus, atomikerrossyövytys
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