Polysidihilan kuviointi 1.5 mikrometrin CMOS-tekniikassa

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Journal Title

Journal ISSN

Volume Title

Helsinki University of Technology | Licentiate thesis
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Date

1986

Major/Subject

Elektronifysiikka

Mcode

1.69

Degree programme

Language

fi

Pages

85

Series

Description

Supervisor

Sinkkonen, Juha

Thesis advisor

Ronkainen, Hannu

Keywords

Other note

Citation