Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbon

Simple item page
dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorHeikkinen, Joonas J.en_US
dc.contributor.authorPeltola, Emiliaen_US
dc.contributor.authorWester, Niklasen_US
dc.contributor.authorKoskinen, Jarien_US
dc.contributor.authorLaurila, Tomien_US
dc.contributor.authorFranssila, Samien_US
dc.contributor.authorJokinen, Villeen_US
dc.contributor.departmentDepartment of Chemistry and Materials Scienceen
dc.contributor.departmentDepartment of Electrical Engineering and Automationen
dc.contributor.groupauthorMicrofabricationen
dc.contributor.groupauthorMicrosystems Technologyen
dc.contributor.groupauthorPhysical Characteristics of Surfaces and Interfacesen
dc.date.accessioned2019-09-03T13:51:05Z
dc.date.available2019-09-03T13:51:05Z
dc.date.issued2019-08-01en_US
dc.description.abstractPattern formation of pyrolyzed carbon (PyC) and tetrahedral amorphous carbon (ta-C) thin films were investigated at micro- and nanoscale. Micro- and nanopillars were fabricated from both materials, and their biocompatibility was studied with cell viability tests. Carbon materials are known to be very challenging to pattern. Here we demonstrate two approaches to create biocompatible carbon features. The microtopographies were 2 μm or 20 μm pillars (1:1 aspect ratio) with three different pillar layouts (square-grid, hexa-grid, or random-grid orientation). The nanoscale topography consisted of random nanopillars fabricated by maskless anisotropic etching. The PyC structures were fabricated with photolithography and embossing techniques in SU-8 photopolymer which was pyrolyzed in an inert atmosphere. The ta-C is a thin film coating, and the structures for it were fabricated on silicon substrates. Despite different fabrication methods, both materials were formed into comparable micro- and nanostructures. Mouse neural stem cells were cultured on the samples (without any coatings) and their viability was evaluated with colorimetric viability assay. All samples expressed good biocompatibility, but the topography has only a minor effect on viability. Two μm pillars in ta-C shows increased cell count and aggregation compared to planar ta-C reference sample. The presented materials and fabrication techniques are well suited for applications that require carbon chemistry and benefit from large surface area and topography, such as electrophysiological and -chemical sensors for in vivo and in vitro measurements.en
dc.description.versionPeer revieweden
dc.format.extent22
dc.format.mimetypeapplication/pdfen_US
dc.identifier.citationHeikkinen, J J, Peltola, E, Wester, N, Koskinen, J, Laurila, T, Franssila, S & Jokinen, V 2019, ' Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbon ', Micromachines, vol. 10, no. 8, 510 . https://doi.org/10.3390/mi10080510en
dc.identifier.doi10.3390/mi10080510en_US
dc.identifier.issn2072-666X
dc.identifier.otherPURE UUID: fb081819-854c-4da2-a177-f07a3d3f1494en_US
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/fb081819-854c-4da2-a177-f07a3d3f1494en_US
dc.identifier.otherPURE LINK: http://www.scopus.com/inward/record.url?scp=85070967116&partnerID=8YFLogxKen_US
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/36522323/Heikkinen_etal_Fabrication_of_Micro_Micromachines_1_8_2019_publishedversion.pdfen_US
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/40154
dc.identifier.urnURN:NBN:fi:aalto-201909035196
dc.language.isoenen
dc.publisherMultidisciplinary Digital Publishing Institute (MDPI)
dc.relation.ispartofseriesMICROMACHINESen
dc.relation.ispartofseriesVolume 10, issue 8en
dc.rightsopenAccessen
dc.subject.keywordBlack siliconen_US
dc.subject.keywordCell viabilityen_US
dc.subject.keywordEmbossingen_US
dc.subject.keywordNanopillarsen_US
dc.subject.keywordNeural stem cellen_US
dc.subject.keywordPyrolysisen_US
dc.subject.keywordSU-8en_US
dc.subject.keywordTa-Cen_US
dc.titleFabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbonen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionpublishedVersion
Files
Collections
[article-cris] Kemian tekniikan korkeakoulu / CHEM