Design, realization, and analysis of a bulge-testing workspace in determining mechanical properties of thin-films in MEMS devices
No Thumbnail Available
URL
Journal Title
Journal ISSN
Volume Title
Sähkötekniikan korkeakoulu |
Bachelor's thesis
Electronic archive copy is available locally at the Harald Herlin Learning Centre. The staff of Aalto University has access to the electronic bachelor's theses by logging into Aaltodoc with their personal Aalto user ID. Read more about the availability of the bachelor's theses.
Authors
Date
2018-10-05
Department
Major/Subject
Bioinformaatioteknologia BIO
Mcode
ELEC3016
Degree programme
Sähkötekniikan kandidaattiohjelma
Language
en
Pages
9+51
Series
Description
Supervisor
Turunen, MarkusThesis advisor
Paulasto-Kröckel, MerviKeywords
thin-film, bulge-test, mechanical characterization, Young's modulus, ultimate tensile strength, Poisson's ratio