Electronics for Micromechanical Angular Rate Sensor
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Helsinki University of Technology |
Diplomityö
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Date
1997
Major/Subject
Piiritekniikka
Mcode
S-87
Degree programme
Language
en
Pages
69
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Description
Supervisor
Halonen, KariThesis advisor
Manninen, HannuKeywords
micromechanics, mikromekaniikka, angular rate, kulmanopeus, sensor, anturi, capacitive, kapasitiivinen