Electronics for Micromechanical Angular Rate Sensor

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Volume Title

Helsinki University of Technology | Diplomityö
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Date

1997

Major/Subject

Piiritekniikka

Mcode

S-87

Degree programme

Language

en

Pages

69

Series

Description

Supervisor

Halonen, Kari

Thesis advisor

Manninen, Hannu

Keywords

micromechanics, mikromekaniikka, angular rate, kulmanopeus, sensor, anturi, capacitive, kapasitiivinen

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