Mikromekaaninen ionilähde piitä ja lasia prosessoimalla
No Thumbnail Available
URL
Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology |
Diplomityö
Checking the digitized thesis and permission for publishing
Instructions for the author
Instructions for the author
Authors
Date
2003
Department
Major/Subject
Mittaustekniikka
Mcode
S-108
Degree programme
Language
fi
Pages
ix + 83
Series
Description
Supervisor
Tittonen, IlkkaThesis advisor
Franssila, SamiKeywords
silicon etching, piin etsaus, glass etching, lasin etsaus, wafer bonding, kiekkobondaus, mass spectrometry, massaspektrometria, APCI