Mikromekaanisen kulmanopeusanturielementin tuotannollisen testauksen kehittäminen
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URL
Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology |
Diplomityö
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Authors
Date
2007
Department
Major/Subject
Optoelektroniikka
Mcode
S-104
Degree programme
Language
fi
Pages
x + 72 s. +liitt. 6
Series
Description
Supervisor
Lipsanen, HarriThesis advisor
Viljakainen, HarriKeywords
angular rate sensor, MEMS, element testing, kulmanopeusanturi, machine vision, elementtitestaus, test development, konenäkö, testauskehitys