(oral talk) Controlling charge polarity and defect density at Ge/Al2O3 interface using SiNx interlayer

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2022

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en

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| openaire: EC/H2020/777222/EU//ATTRACT

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Liu, H, Pasanen, T, Fung, T H, Isometsä, J, Leiviskä, O, Vähänissi, V & Savin, H 2022, ' (oral talk) Controlling charge polarity and defect density at Ge/Al2O3 interface using SiNx interlayer ', Conference on Gettering and Defect Engineering in Semiconductor Technology, Mondsee, Austria, 11/09/2022 - 17/09/2022 .