Characterization of thin film resistor sputtered with two different chromium silicide targets
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Helsinki University of Technology |
Diplomityö
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Instructions for the author
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Date
2002
Department
Major/Subject
Metalli- ja materiaalioppi
Mcode
Mak-45
Degree programme
Language
en
Pages
61
Series
Description
Supervisor
Lindroos, VeikkoThesis advisor
Virolainen, UllaHaimi, Eero
Keywords
chromium silicide, kromisilisidi, sputtering, sputterointi, thin film resistor, ohutkalvovastus