Contamination control in Aalto Nanofab cleanroom

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Journal Title

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Volume Title

Kemiantekniikan korkeakoulu | Bachelor's thesis
Electronic archive copy is available locally at the Harald Herlin Learning Centre. The staff of Aalto University has access to the electronic bachelor's theses by logging into Aaltodoc with their personal Aalto user ID. Read more about the availability of the bachelor's theses.

Authors

Kettula, Paula

Date

2015-12-23

Department

Major/Subject

Materiaalitekniikka

Mcode

MT901

Degree programme

Materiaalitekniikka MTE

Language

en

Pages

24

Series

Description

Supervisor

Laaksonen, Päivi

Thesis advisor

Franssila, Sami

Keywords

cleanroom, nanotechnology, contamination control

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