AlxGa1-xAs-HEMT:n Valmistus ja Karakterisointi
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Helsinki University of Technology |
Licentiate thesis
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Date
1994
Department
Major/Subject
Elektronifysiikka
Mcode
S-69
Degree programme
Language
fi
Pages
76
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Description
Supervisor
Sinkkonen, JuhaKeywords
GaAs, GaAs, AlxGa1-xAs, AlxGa1-xAs, HEMT, HEMT, MODFET, MODFET, TEGFET, TEGFET, RIE, RIE, dry etching, kuivaetsaus, plasma etching, plasmaetsaus