Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films**

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Journal Title
Journal ISSN
Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2021-06-16
Major/Subject
Mcode
Degree programme
Language
en
Pages
5
8799-8803
Series
Chemistry - A European Journal, Volume 27, issue 34
Abstract
** ALD=atomic layer deposition; MLD=molecular layer deposition. Two new atomic/molecular layer deposition processes for depositing crystalline metal-organic thin films, built from 1,4-benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node, are reported. The processes yield in-situ crystalline but hydrated Cu-BDS and Li-BDS films; in the former case, the crystal structure is of a previously known metal-organic-framework-like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. The stability and the ionic conductivity of the unhydrated Li-BDS films were characterized to assess their applicability as a thin film solid polymer Li-ion conductor.
Description
Funding Information: The authors would like to thank the Academy of Finland (Profi 3 and 5 projects) and the European Union's Horizon 2020 research and innovation program under grant agreement CREATE No. 721065 for funding this work. This study made use of RawMatTERS Finland Infrastructure (Aalto – RAMI). Publisher Copyright: © 2021 The Authors. Chemistry - A European Journal published by Wiley-VCH GmbH Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
Keywords
atomic layer deposition, metal-organic frameworks, molecular layer deposition, solid electrolyte, sulfonate
Other note
Citation
Heiska , J , Sorsa , O , Kallio , T & Karppinen , M 2021 , ' Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films** ' , Chemistry: A European Journal , vol. 27 , no. 34 , pp. 8799-8803 . https://doi.org/10.1002/chem.202100538