Tribology of Micro Electro Mechanical Systems

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Volume Title
Bachelor's thesis
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Date
2007
Major/Subject
Koneensuunnittelu
Mcode
K3001
Degree programme
Konetekniikan tutkinto-ohjelma
Language
en
Pages
29
Series
Description
Supervisor
Pietola, Matti
Thesis advisor
Calonius, Olof
Keywords
MEMS, microtribology
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Citation