Recent advances in piezoelectric resonant infrared detectors
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A2 Katsausartikkeli tieteellisessä aikakauslehdessä
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en
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Infrared Physics and Technology, Volume 152
Abstract
Uncooled micro-electromechanical systems-based piezoelectric resonant infrared detectors exploit photothermal–piezoelectric coupling for highly sensitive, wavelength-selective detection. Their compact, low-power, and easily integrable design ensures stable performance in noisy environments, enabling advanced infrared sensing and processing in complex conditions. Here, we review two operating mechanisms of piezoelectric resonant infrared detectors and their state of the art results. It provides an overview of piezoelectric resonant infrared detectors fabricated using materials such as gallium nitride (GaN), zinc oxide (ZnO), and lithium niobate (LiNbO3). Subsequently, we discuss performance enhancements for aluminum nitride (AlN)-based detectors, focusing on infrared absorption, thermal resistance, detection sensitivity, and potential applications. Finally, we present potential challenges facing piezoelectric resonant infrared detectors and outline future research directions.Description
Publisher Copyright: © 2025 Elsevier B.V.
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Zhao, J, Hou, H, Dang, Y, Ma, Y, Li, L, Sun, H, Sun, Z & Xu, T 2026, 'Recent advances in piezoelectric resonant infrared detectors', Infrared Physics and Technology, vol. 152, 106155. https://doi.org/10.1016/j.infrared.2025.106155