Self-organized InP islands on (100) GaAs by metalorganic vapor phase epitaxy

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© 1995 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/jap
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Volume Title

School of Electrical Engineering | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Date

1995

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Mcode

Degree programme

Language

en

Pages

3768-3770

Series

Applied Physics Letters, Volume 67, Issue 25

Abstract

The effect of growth temperature, deposition rate, and substrate misorientation angle on size, density, and uniformity of InP islands grown on (100) GaAs by metalorganic vapor phase epitaxy is investigated. The density of InP islands is observed to remain constant as a function of growth temperature in the temperature range of 620–680 °C. Below 620 °C the island density increases with decreasing temperature. Above 605 °C a subset of islands having a uniform size is observed. The degree of uniformity depends largely on the deposition rate and the size of the uniform islands on the growth temperature.

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Keywords

metalorganic vapor phase epitaxy, indium phosphide islands

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Citation

Sopanen, M. & Lipsanen, Harri & Ahopelto, J. 1995. Self-organized InP islands on (100) GaAs by metalorganic vapor phase epitaxy. Applied Physics Letters. Volume 67, Issue 25. P. 3768-3770. ISSN 0003-6951 (printed). DOI: 10.1063/1.115377.